A compact, ultra-high vacuum ion source for isotopically enriching and depositing 28Si thin films-Reference-Cited by-同舟云学术

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A compact, ultra-high vacuum ion source for isotopically enriching and depositing 28Si thin films

Published:2019-08 Issue:8 Volume:90 Page:083308
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Tang K.¹²^ORCID,Kim H. S.²³,Ramanayaka A. N. R.²^ORCID,Simons D. S.²^ORCID,Pomeroy J. M.²^ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20740, USA

2. National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8423, USA

3. Department of Electrical and Computer Engineering, University of Maryland, College Park, Maryland 20740, USA

Funder

National Institute of Standards and Technology

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5097937

Reference24 articles.

1. An addressable quantum dot qubit with fault-tolerant control-fidelity

2. Storing quantum information for 30 seconds in a nanoelectronic device

3. A quantum-dot spin qubit with coherence limited by charge noise and fidelity higher than 99.9%

4. A two-qubit logic gate in silicon

5. Room-Temperature Quantum Bit Storage Exceeding 39 Minutes Using Ionized Donors in Silicon-28

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon-28-Tetrafluoride as an Educt of Isotope-Engineered Silicon Compounds and Bulk Materials for Quantum Systems;Molecules;2024-09-05

2. Synthesis, Processing, and Use of Isotopically Enriched Epitaxial Oxide Thin Films;Accounts of Materials Research;2024-08-08

3. Highly 28Si enriched silicon by localised focused ion beam implantation;Communications Materials;2024-05-07

4. Silicon photonic quantum computing with spin qubits;APL Photonics;2021-07-01

5. Bulk and Short‐Circuit Anion Diffusion in Epitaxial Fe 2 O 3 Films Quantified Using Buried Isotopic Tracer Layers;Advanced Materials Interfaces;2021-03-09

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