Sodium diffusion in 4H-SiC
Author:
Affiliation:
1. Integrated Devices and Circuits, KTH Royal Institute of Technology, Electrum 229, SE-164 40 Kista, Sweden
Funder
ÅForsk
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/aplmater/2/9/1.4895040.pdf?itemId=/content/aip/journal/aplmater/2/9/10.1063/1.4895040&mimeType=pdf&containerItemId=content/aip/journal/aplmater
Reference17 articles.
1. Ion Transport Phenomena in Insulating Films
2. Sodium distribution in thermal oxide on silicon by radiochemical and MOS analysis
3. Sodium-Induced Barrier-Height Lowering and Dielectric Breakdown on SiO[sub 2] Films on Silicon
4. Drift mobilities of Na+and K+ions in SiO2films
5. The mobility of Na+, Li+, and K+ions in thermally grown SiO2films
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