Buried layer formation in silicon by laser radiation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362647
Reference8 articles.
1. Synthesis of Buried Silicon Compounds Using Ion Implantation
2. Transistor action in Si/CoSi2/Si heterostructures
3. New conception in transistor technology using nonhomogenous temperature field
4. The kinetics of precipitation from supersaturated solid solutions
5. Evolution of buried compound layers formed by ion implantation
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