Author:
Goluch Edgar D.,Shaikh Kashan A.,Ryu Kee,Chen Jack,Engel Jonathan,Liu Chang
Subject
Physics and Astronomy (miscellaneous)
Reference18 articles.
1. W. J. Li, J. D. Mai, and C.M. Ho, Proceedings of the IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany, 25–29 January 1998, p. 268.
2. S. C. Jacobsen, D. L. Wells, C. C. Davis, and J. E. Wood, Proceedings of IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Nara, Japan, 30 Jan.–2 Feb. 1991, p. 45.
3. M. Mullenborn, H. Dirac, J. W. Petersen, and S. Bouwstra, Sensors and Actuators A (Physical) International Solid-State Sensors and Actuators Conference—TRANSDUCERS’95, Stockholm, Sweden, 25–29 June 1995, Vol. A52, p. 121.
4. Fine surface finishing method for 3-dimensional micro structures
5. S. B. Blickenstaff, T. R. Nelson, and A. M. Sarangan, 2003 IEEE LEOS Annual Meeting Conference Proceedings, Tuscon, AZ, 26–30 Oct. 2003, Vol. 2, p. 700.
Cited by
26 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献