1. Institute of Physics, Czech Academy of Sciences 1 , Na Slovance 1999/2, 182 21 Prague 8, Czech Republic
2. Institute of Plasma Physics, Czech Academy of Sciences 2 , Za Slovankou 3, 182 00 Prague 8, Czech Republic
3. P. N. Lebedev Physical Institute of the Russian Academy of Sciences 3 , Leninskij pr., 53, 119991 Moscow, Russia
4. National Research Centre ‘Kurchatov Institute’ 4 , Kurchatov Sq. 1, 123182 Moscow, Russia
5. Joint Institute for Nuclear Research 5 , Joliot-Curie 6, 141980, Dubna, Moscow Region, Russia
6. The Institute of Nuclear Physics 6 , Ibragimov St. 1, 050032 Almaty, Kazakhstan
7. Industrial Focus Group XUV Optics, MESA+Institute for Nanotechnology, University of Twente 7 , Drienerlolaan 5, 7522 NB Enschede, The Netherlands