Membrane sandwich squeeze film pressure sensors
Author:
Affiliation:
1. Department of Physics and Astronomy, University of Aarhus, DK-8000 Aarhus C, Denmark
Funder
Independent Research Fund Denmark
Villum Fonden
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0011795
Reference43 articles.
1. Squeeze film air damping in MEMS
2. On Isothermal Squeeze Films
3. Q-factor and frequency shift of resonating silicon diaphragms in air
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