Piezoresistive properties of single crystalline, polycrystalline, and nanocrystalline n-type 3C-SiC
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1775052
Reference27 articles.
1. Characterization of n-type beta -SiC as a piezoresistor
2. Silicon on insulator material technology
3. Frontiers of silicon-on-insulator
4. Chemical-vapor-deposition growth and characterization of epitaxial 3C–SiC films on SOI substrates with thin silicon top layers
5. Suppression of Si Cavities at the SiC/Si Interface during Epitaxial Growth of 3C-SiC on Silicon-on-Insulator
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