1. Institute for Microelectronics, Technische Universität Wien 1 , Gußhausstraße 27–29, 1040 Vienna, Austria
2. Christian Doppler Laboratory for Single-Defect Spectroscopy in Semiconductor Devices at the Institute for Microelectronics 2 , TU Wien, 1040 Vienna, Austria
3. Data Science and Learning Division, Argonne National Laboratory 3 , Lemont, Illinois 60439, USA