Full silicidation process for making CoSi2 on SiO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1728299
Reference2 articles.
1. Silicides for integrated circuits: TiSi2 CoSi2
2. Molecular beam allotaxy: a new approach to epitaxial heterostructures
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