Parameters of a collisional radio-frequency sheath and dust characteristics resulting from the microparticle levitation
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3251519
Reference22 articles.
1. Effect of Ion Mass and Ion Energy on Low-Temperature Deposition of Polycrystalline-Si Thin Film on SiO2Layer by Using Sputtering-Type Electron Cyclotron Resonance Plasma
2. Synthesis and ellipsometric characterization of insulating low permittivity SiO2 layers by remote-PECVD using radio-frequency glow discharge
3. Deposition mechanism of hydrogenated hard‐carbon films in a CH4rf discharge plasma
4. Sheaths: More complicated than you think
5. Dust as fine electrostatic probes for plasma diagnostic
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