cw Ar+laser annealing of optically active impurities in nitrogen‐implanted AlxGa1−xAs (x=0.58)
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91233
Reference7 articles.
1. Composition‐ratio dependence of formation of bound states in nitrogen‐implanted AlxGa1−xAs
2. Composition‐ratio dependence of formation of bound states in nitrogen‐implanted AlxGa1−xAs
3. Observation ofinsituannealing in hot ion‐implantation of nitrogen into AlxGa1−xAs (x=0.53)
4. Optical absorption coefficient of (Al0.42Ga0.58)As
5. Photoluminescence excitation spectra of nitrogen‐implanted AlxGa1−xAs
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Transient annealing of semiconductors by laser, electron beam and radiant heating techniques;Reports on Progress in Physics;1985-08-01
2. Laser Processing of Semiconductors;Laser Processing and Analysis of Materials;1983
3. Annealing of nitrogen‐implanted GaAs1−xPxby a swept line electron beam;Journal of Applied Physics;1980-08
4. DEFECTS IN LASER-PROCESSED SEMICONDUCTORS;Laser and Electron Beam Processing of Materials;1980
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