Characterization of Organic Contamination in Semiconductor Manufacturing Processes-Reference-Cited by-同舟云学术

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Characterization of Organic Contamination in Semiconductor Manufacturing Processes

Published:2009 Issue: Volume: Page:
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Container-title:AIP Conference Proceedings
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Nutsch A.,Beckhoff B.,Bedana G.,Borionetti G.,Codegoni D.,Grasso S.,Guerinoni G.,Leibold A.,Müller M.,Otto M.,Pfitzner L.,Polignano M.-L.,De Simone D.,Frey L.,Secula Erik M.,Seiler David G.,Khosla Rajinder P.,Herr Dan,Michael Garner C.,McDonald Robert,Diebold Alain C.

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AIP

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Optimization and Validation of Sampling and TD-GCMS Analysis for Volatile Organic Compounds from Semiconductor Cleaning Coupons;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17

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4. WET Organic Impurities induced Carbon Contamination on Surface/Sub-surface of Silicon : CFM: Contamination Free Manufacturing;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01

5. Real-time monitoring of critical AMC compounds in the photolithography cell using a novel laser-based, multi-species detection system;Metrology, Inspection, and Process Control XXXVI;2022-05-26

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