1. Moscow Institute of Physics and Technology, State University, 9 Institutskiy per., Dolgoprudny, Moscow Region 141700, Russia
2. The Laboratory of Superconducting Metamaterials, National University of Science and Technology MISIS, 4 Leninsky prosp., Moscow 119049, Russia
3. Institute of Solid State Physics (ISSP RAS), Chernogolovka, Moscow Region 142432, Russia
4. Solid State Physics Department, Kazan Federal University, Kazan 420008, Russia
5. Faculty of Science and Technology and MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
6. Physikalisches Institut, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany