Dynamic x-ray spectrometry method for determining stoichiometry of thin films during growth
Author:
Affiliation:
1. Neocera LLC, 10000 Virginia Manor Rd., Beltsville, Maryland 20705, USA
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5029900
Reference16 articles.
1. Defects and transport in complex oxide thin films
2. Cation ratio and ferroelectric properties of TbMnO3 epitaxial films grown by pulsed laser deposition
3. D. P. Norton , in Pulsed Laser Deposition of Thin Films, edited by R. Easton ( Wiley, Hoboken, 2007), p. 5.
4. Impact of the interplay between nonstoichiometry and kinetic energy of the plume species on the growth mode of SrTiO3thin films
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1. Combinatorial synthesis of heteroepitaxial, multi-cation, thin-films via pulsed laser deposition coupled with in-situ, chemical and structural characterization;Scientific Reports;2022-03-07
2. In situ compositional mapping of combinatorial materials libraries by scanning low-angle x-ray spectroscopy;Journal of Vacuum Science & Technology A;2021-05
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