Author:
Matsuoka Morito,Ono Ken’ichi
Subject
Physics and Astronomy (miscellaneous)
Cited by
13 articles.
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1. Magnetron Discharges for Thin Films Plasma Processing;Materials Surface Processing by Directed Energy Techniques;2006
2. High-density plasma sources;Ionized physical vapor deposition;2000
3. Low-pressure magnetron sputtering;Vacuum;1998-07
4. Discharge characteristics of a facing target sputtering device using unbalanced magnetrons;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-07
5. Copper deposition by electron cyclotron resonance plasma;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1993-11