Self-limiting size control of hemispherical grains of microcrystalline Si self-assembled on an amorphous Si film surface
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1558214
Reference10 articles.
1. Resonant tunneling through a self-assembled Si quantum dot
2. A silicon nanocrystals based memory
3. Single Electron Memory Devices Based on Plasma-Derived Silicon Nanocrystals
4. Memory Operation of Silicon Quantum-Dot Floating-Gate Metal-Oxide-Semiconductor Field-Effect Transistors
5. Crystallization of Amorphous Silicon with Clean Surfaces
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2. Formation of polycrystalline-silicon films with hemispherical grains for capacitor structures with increased capacitance;Semiconductors;2014-12
3. Studying the morphology of hemispherical-grain polycrystalline silicon films;Technical Physics Letters;2012-08
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