Atom lithography with metastable helium
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3295903
Reference18 articles.
1. Minimizing feature width in atom optically fabricated chromium nanostructures
2. Using light as a lens for submicron, neutral-atom lithography
3. Laser-Focused Atomic Deposition
4. Atom-optical properties of a standing-wave light field
5. Nanofabrication of a two‐dimensional array using laser‐focused atomic deposition
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