Cantilever based mass sensor with hard contact readout
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2217161
Reference13 articles.
1. Nanoelectromechanical systems face the future
2. Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
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