1. School of Semiconductors and Physics, North University of China 1 , Taiyuan 030051, China
2. School of Instrumentation and Intelligent Future Technology, North University of China 2 , Taiyuan 030051, China
3. Academy for Advanced Interdisciplinary Research, North University of China 3 , Taiyuan 030051, China
4. Center for Microsystem Integration, North University of China 4 , Taiyuan 030051, China
5. School of Instrumentation and Electronics, North University of China 5 , Taiyuan 030051, China
6. School of Aeronautics and Astronautics, North University of China 6 , Taiyuan 030051, China
7. Key Laboratory of Dynamic Measurement Technology, North University of China 7 , Taiyuan 030051, China