Characterization of ion implanted and laser annealed polycrystalline Si by a Raman microprobe
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93576
Reference4 articles.
1. Microstrain in laser‐crystallized silicon islands on fused silica
2. Raman scattering study of ion implanted and C.W.-Laser annealed polycrystalline silicon
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Influence of laser annealing conditions on the performance of 0.6-μm polysilicon TFTs;SPIE Proceedings;1999-09-01
2. Characterization of thermally annealed thin silicon films on insulators by Raman image measurement;Journal of Applied Physics;1995-09
3. Applied optical diagnostics of semiconductors;Proceedings of the IEEE;1992-03
4. Observation of Ferroelastic Domains in LaNbO4by Micro-Raman Spectroscopy;Journal of the Physical Society of Japan;1990-12-15
5. Surface Structure of Ion-Implanted Silica Glass;Japanese Journal of Applied Physics;1990-05-20
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