1. College of Environmental Science and Engineering, Jilin Normal University, Siping 136000, People’s Republic of China
2. Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, People’s Republic of China
3. Key Laboratory of Preparation and Application of Environmental Friendly Materials of the Ministry of Education, Jilin Normal University, Changchun 130103, People’s Republic of China
4. Jilin Special Equipment Inspection and Research Institute, Jilin 132013, People’s Republic of China
5. School of Engineering and Architecture, Northeast Electric Power University, Jilin 132012, People’s Republic of China
6. GLOBALFOUNDRIES (Singapore) Pte. Ltd, 60 Woodlands Industrial Park D, Street 2, Singapore 738406, Singapore