Accurate localization method for subaperture stitching interferometry in aspherical optics metrology-Reference-Cited by-同舟云学术

Accurate localization method for subaperture stitching interferometry in aspherical optics metrology

Published:2020-07-01 Issue:7 Volume:91 Page:075114
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Zhao Zhuo¹²^ORCID,Li Bing¹²,Kang Xiaoqin¹,Lu Jiasheng¹,Wei Xiang¹,Liu Tongkun¹^ORCID

Affiliation:

1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, No. 99 Yanxiang Road, Yanta District, Xi’an, Shaanxi 710054, China

2. International Joint Research Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0006693

Reference23 articles.

1. Problems in the application of a null lens for precise measurements of aspheric mirrors

2. Ultra-high accuracy point diffraction interferometer: development, acccuracy evaluation and application

3. Precision optical path alignment system for point diffraction interferometer based on image information

4. Variable optical null based on a yawing CGH for measuring steep acylindrical surface

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