Spectroscopic ellipsometry characterization of HfxSiyOz films using the Cody–Lorentz parameterized model
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1784889
Reference13 articles.
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5. Erratum: ‘‘Parameterization of the optical functions of amorphous materials in the interband region’’ [Appl. Phys. Lett. 69, 371 (1996)]
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