Signal transformation approach to fast nanopositioning
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3160016
Reference11 articles.
1. Precision Positioning of Wafer Scanners Segmented Iterative Learning Control for Nonrepetitive Disturbances [Applications of Control]
2. Nanopositioning for probe-based data storage [Applications of Control]
3. A Survey of Control Issues in Nanopositioning
4. High performance feedback for fast scanning atomic force microscopes
5. High bandwidth nano-positioner: A robust control approach
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1. Signal-Transformation-Based Tracking Control of Nano-positioning Stage with Kalman Filter;2022 41st Chinese Control Conference (CCC);2022-07-25
2. A Novel State Transformation Approach to Tracking of Piecewise Linear Trajectories;IEEE Transactions on Control Systems Technology;2018-01
3. The Four Pillars of Nanopositioning for Scanning Probe Microscopy: The Position Sensor, the Scanning Device, the Feedback Controller, and the Reference Trajectory;IEEE Control Systems;2013-12
4. A high-speed electromagnetically-actuated scanner for dual-stage nanopositioning;IFAC Proceedings Volumes;2013
5. A Hybrid Control Approach to Nanopositioning;Smart Materials-Based Actuators at the Micro/Nano-Scale;2013
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