A technique for accurate measurements of ion beam current density using a Faraday cup
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1287635
Reference14 articles.
1. Measurement and modelling of primary beam shape in an ion microprobe mass analyser
2. A novel procedure for measuring the absolute current density profile of a focused gallium‐ion beam
3. New characterization method of ion current-density profile based on damage distribution of Ga+ focused-ion beam implantation in GaAs
4. Current‐density profiles for a Ga+ion microprobe and their lithographic implications
5. Versatile apparatus for low‐energy and hyperthermal energy ion scattering spectroscopies
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