Ion beam enabled nanoscale fabrication, surface patterning, and self-assembly
Author:
Affiliation:
1. IBM Almaden Research Center, San Jose, California 95120, USA
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5143650
Reference13 articles.
1. Ion-induced nanopatterning of silicon: Toward a predictive model
2. Prediction of ion-induced nanopattern formation using Monte Carlo simulations and comparison to experiments
3. Cluster beams, nano-ripples, and bio applications
4. Ion irradiation of III–V semiconductor surfaces: From self-assembled nanostructures to plasmonic crystals
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3. de Gennes Narrowing and Relationship between Structure and Dynamics in Self-Organized Ion-Beam Nanopatterning;Physical Review Letters;2021-01-07
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