FORMATION OF EPITAXIAL β‐SiC FILMS ON SAPPHIRE
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1652881
Reference8 articles.
1. Cubic β-silicon carbide films on silicon substrates
2. Epitaxial Growth of SiC Film on Silicon Substrate and Its Crystal Structure
3. THE GROWTH OF SINGLE‐CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICON
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2. III-V Nitrides and Silicon Carbide as Optoelectronic Materials;The Handbook of Photonics, Second Edition;2006-12-21
3. SiC materials-progress, status, and potential roadblocks;Proceedings of the IEEE;2002-06
4. Comparison of the Pyrolysis Products of Dichlorodimethylsilane in the Chemical Vapor Deposition of Silicon Carbide on Silica in Hydrogen or Argon;Journal of the American Ceramic Society;1994-10
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