1. Technology and applications of micromachined silicon adaptive mirrors
2. D. J. Young, and B. E. Boser, in Proceedings of the IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC (IEEE, New York, 1996), p. 86.
3. R. T. Chen, H. Nguyen, and M. C. Wu, in Proceedings of the IEEE Micro Electro Mechanical Systems Conference MEMS’99, Orlando, FL (IEEE, New York, 1999), p. 424.
4. Micromachined low-loss microwave switches
5. The resonant gate transistor