Properties of amorphous hydrogenated carbon films from ArF laser‐induced C2H2photolysis
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346724
Reference13 articles.
1. Amorphous carbon
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4. Reinvestigation of the carbon films prepared by ArF excimer laser‐induced chemical vapor deposition
5. Optical constants of a hydrogenated amorphous carbon film
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