Phonon-assisted charge carriers thermalization in semiconductor Si and metallic silicide NiSi2, CoSi2: A non-adiabatic molecular dynamics study

Author:

Luo Kun12ORCID,Gan Weizhuo13,Hou Zhaozhao3,Zhan Guohui12ORCID,Xu Lijun12ORCID,Liu Jiangtao4ORCID,Wu Zhenhua12ORCID

Affiliation:

1. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences 1 , Beijing 100029, China

2. School of Physics, Zhejiang University 2 , Hangzhou 310058, China

3. HiSilicon Technologies 3 , Shenzhen, China

4. College of Mechanical and Electrical Engineering, Guizhou Minzu University 4 , Guiyang 550025, China

Abstract

Recently, the cold source field-effect transistor (CSFET) has emerged as a promising solution to overcome Boltzmann tyranny in its ballistic regime, offering a steep-slope subthreshold swing (SS) of less than 60 mV/decade. However, challenges arise due to scattering, particularly from inelastic scattering, which can lead to significant degradation in SS through cold carrier thermalization. In this study, we delve into the theoretical investigation of the electronic excitation/relaxation dynamic process using the state-of-the-art nonadiabatic molecular dynamics (NAMD) method. The mixed quantum-classical NAMD proves to be a powerful tool for comprehensively analyzing cold carrier thermalization and transfer processes in semiconductor Si, as well as metallic silicides (NiSi2 and CoSi2). The approach of mixed quantum-classical NAMD takes into account both carrier decoherence and detailed balance, enabling the calculation of thermalization factors, relaxation times, scattering times, and scattering rates at various energy levels. The thermalization of carriers exhibits a gradual increase from low to high energy levels. Achieving partial thermalization from the ground state to reach the thermionic current window occurs within a sub-100 fs time scale. Full thermalization across the entire energy spectrum depends sensitively on the barrier height, with the scattering rate exponentially decreasing as the energy of the out-scattering state increases. Notably, the scattering rate of NiSi2 and CoSi2 is two orders of magnitude higher than that of Si, attributed to their higher density of states compared to Si. This study not only provides insights into material design for low-power tunnel field-effect transistors but also contributes valuable information for advancing CSFET in emerging technologies.

Funder

Ministry of Science and Technology of the People's Republic of China

National Natural Science Foundation of China

Guizhou Provincial Youth Science and Technology Talents Growth Project

Publisher

AIP Publishing

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