Force-rebalanced Lorentz force magnetometer based on a micromachined oscillator

Author:

Sonmezoglu S.1,Li M.1,Horsley D. A.2ORCID

Affiliation:

1. Department of Electrical and Computer Engineering, University of California at Davis, Davis, California 95616, USA

2. Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, California 95616, USA

Funder

National Science Foundation (NSF)

Defense Advanced Research Projects Agency (DARPA)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Combined Rotation and Magnetic Field Sensor Based on Lissajous FM Technique;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28

2. Lorentz Force Frequency Modulated MEMS Magnetometer Using CW/CCW Mode Separator on Quad Mass Resonator;IEEJ Transactions on Sensors and Micromachines;2022-09-01

3. A MEMS Resonant Lorentz-Force Magnetometer with Both Structural Topology Optimization and Parametric Pumping for Q-Factor Enhancement;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09

4. A Resonant Lorentz-Force Magnetometer Featuring Slotted Double-Ended Tuning Fork Capable of Operating in a Bias Magnetic Field;Journal of Microelectromechanical Systems;2021-12

5. Highly sensitive low field Lorentz-force MEMS magnetometer;Scientific Reports;2021-11-04

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