Increased carbon nanotube area density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4870949
Reference40 articles.
1. Carbon Nanotubes--the Route Toward Applications
2. Carbon nanotubes in interconnect applications
3. Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties
4. Growth of nanotubes for electronics
5. High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes
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1. Horizontally aligned surface segments enhancing the adhesion of carbon nanotube forests;Carbon;2021-05
2. Facile synthesis of high density carbon nanotube array by a deposition-growth-densification process;Carbon;2017-04
3. Overview of Carbon Nanotube Interconnects;Carbon Nanotubes for Interconnects;2016-07-10
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