Mechanisms of amorphization in crystalline silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.355222
Reference11 articles.
1. Crystalline to amorphous transformation in ion‐implanted silicon: a composite model
2. Ion implantation in semiconductors—Part II: Damage production and annealing
3. Damaged regions in neutron-irradiated and ion-bombarded Ge and Si
4. Mechanisms of amorphization in ion implanted crystalline silicon
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