Effect of energetic particles on island formation in sputter deposition of Pt on Pt(111)
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118351
Reference13 articles.
1. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
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4. Effect of energetic neutralized noble gas ions on the structure of ion beam sputtered thin metal films
5. Diamond films by ion‐assisted deposition at room temperature
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