Ionization of atomic oxygen on the surface of a specimen in plasma anodization
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342921
Reference20 articles.
1. Silicon Oxidation in an Oxygen Plasma Excited by Microwaves
2. Silicon Oxide Films Grown in a Microwave Discharge
3. Low Temperature Oxidation of Silicon in a Microwave‐Discharged Oxygen Plasma
4. The Formation of Metal Oxide Films Using Gaseous and Solid Electrolytes
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2. Influence of surface oxidation on the structure and properties of cold metal cathodes;Russian Physics Journal;2007-02
3. Electrochemistry using plasma;Advanced Materials;1995-03
4. Real‐time observation of ultrathin silicon oxide film growth using rapid ellipsometry;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-07
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