Thermoluminescence and Color Centers in rf‐Sputtered SiO2 Films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661501
Reference46 articles.
1. Sputtering of Dielectrics by High‐Frequency Fields
2. Dielectric Thin Films through rf Sputtering
3. Application of RF Discharges to Sputtering
4. CXI. The optical effects of radiation induced atomic damage in quartz
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