Nondestructive diagnostic method using ac surface photovoltage for detecting metallic contaminants in silicon wafers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.353425
Reference21 articles.
1. Effect of Chemicals on Metal Contamination on Silicon Wafers
2. A Method for the Measurement of Short Minority Carrier Diffusion Lengths in Semiconductors
3. Surface Photovoltage Spectroscopy—A New Approach to the Study of High-Gap Semiconductor Surfaces
4. Frequency dependence of the photo-EMF of strongly inverted Ge and Si MIS structures—I. Theory
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