Effects of a low-energy ion beam on the growth of titanium nitride layers near the interface of a polyimide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123322
Reference14 articles.
1. Enhancement of titanium nitride barrier metal properties by nitrogen radical assisted metalorganic chemical vapor deposition
2. Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers
3. Characterization of thin, transparent and conductive TiN films prepared by radio frequency sputtering
4. Nitrogenation of various transition metals by N+2-ion implantation
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