Copper electroforming replication process for soft x-ray mirrors

Author:

Yamaguchi Gota1ORCID,Motoyama Hiroto2ORCID,Owada Shigeki34ORCID,Kubota Yuya4ORCID,Egawa Satoru5ORCID,Kume Takehiro6ORCID,Takeo Yoko37ORCID,Yabashi Makina34ORCID,Mimura Hidekazu1ORCID

Affiliation:

1. Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan

2. Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan

3. Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan

4. RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan

5. RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

6. Technology Center, Natsume Optical Corporation, 1200-29 Kawaji, Iida, Nagano 399-2431, Japan

7. Institute for Solid State Physics, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8581, Japan

Funder

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

Instrumentation

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