Argon ion beam induced surface pattern formation on Si
Author:
Affiliation:
1. 2nd Institute of Physics, Faculty of Physics, University Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4940141
Reference65 articles.
1. Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment
2. Spontaneous Pattern Formation on Ion Bombarded Si(001)
3. Highly ordered self-organized dot patterns on Si surfaces by low-energy ion-beam erosion
4. Tuning the quality of nanoscale ripple patterns by sequential ion-beam sputtering
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