Ion-induced surface activation, chemical sputtering, and hydrogen release during plasma-assisted hydrocarbon film growth
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1883729
Reference24 articles.
1. Ultrathin carbon coatings for magnetic storage technology
2. ME-C:H coatings in motor vehicles
3. Can plasma experiments unravel microscopic surface processes in thin film growth and erosion? Implications of particle–beam experiments on the understanding of a-C:H growth
4. Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching
5. The influence of hydrogen ion bombardment on plasma-assisted hydrocarbon film growth
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