Oxide growth in an rf plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.327627
Reference19 articles.
1. Josephson Tunneling Barriers by rf Sputter Etching in an Oxygen Plasma
2. Application of RF Discharges to Sputtering
3. Oxidation of lead films by rf sputter etching in an oxygen plasma
4. The growth of thin PbO layers on lead films
5. Kinetics of Oxide Film Growth on Metal Crystals: Electron Tunneling and Ionic Diffusion
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