Nitrogen self-diffusion in magnetron sputtered Si-C-N films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3585780
Reference53 articles.
1. Synthesis of dense silicon-based ceramics at low temperatures
2. Novel binary and ternary phases in the Si-C-N system
3. Silazane derived ceramics and related materials
4. Amorphous Multinary Ceramics in the Si-B-N-C System
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