Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime
Author:
Affiliation:
1. School of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, P. R. China
2. Integrated Circuit Advanced Process Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5025611
Reference29 articles.
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5. Graphene based piezoresistive pressure sensor
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