A slab‐shaped electron cyclotron resonance ion beam source for in‐line running target treatments
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146796
Reference6 articles.
1. Elongated microwave electron cyclotron resonance heating plasma source
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3. Summary Abstract: Plasma polymerization: State, problems, and recent developments of the production technology
4. Optimized microwave coupling in an electron cyclotron resonance etch tool
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1. A simple microwave component for the vacuum window protection in an ECR ion source for ion beam processing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-04
2. Nonlinear calculation of three-dimensional static magnetic fields;IEEE Transactions on Magnetics;1997-07
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