Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen-Reference-Cited by-同舟云学术

Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen

Published:2007-08-27 Issue:9 Volume:91 Page:094102
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Park K. K.,Lee H. J.,Yaralioglu G. G.,Ergun A. S.,Oralkan Ö.,Kupnik M.,Quate C. F.,Khuri-Yakub B. T.,Braun T.,Ramseyer J.-P.,Lang H. P.,Hegner M.,Gerber Ch.,Gimzewski J. K.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2776348

Reference10 articles.

1. A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

2. Micromachined acoustic resonant mass sensor

3. Trace Chemical Vapor Detection Using SAW Delay Line Oscillators

4. A quartz‐crystal microbalance apparatus for water sorption by polymers

5. Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

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