Fabrication of tunable diffraction grating by imprint lithography with photoresist mold-Reference-Cited by-同舟云学术

Fabrication of tunable diffraction grating by imprint lithography with photoresist mold

Published:2018-05 Issue:5 Volume:89 Page:053110
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Yamada Itsunari¹,Ikeda Yusuke²,Higuchi Tetsuya²

Affiliation:

1. Department of Electrical and Electronic Engineering, Faculty of Science and Engineering, Setsunan University, 17-8 Ikeda-Nakamachi, Neyagawa, Osaka 572-8508, Japan

2. Department of Electronic Systems Engineering, School of Engineering, The University of Shiga Prefecture, 2500, Hassaka-cho, Hikone, Shiga 522-8533, Japan

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4995449

Reference36 articles.

1. Self-healing of optical functions by molecular metabolism in a swollen elastomer

2. Ink-jet process for creating fluorescent microdroplet

3. Towards an Integrated Optofluidic Diffractive Spectrometer

4. Design and fabrication of a planar PDMS transmission grating microspectrometer

5. Silicone microlenses and interference gratings

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2. Fabrication of PDMS-based volume Bragg gratings by stitching of femtosecond laser filament;Japanese Journal of Applied Physics;2021-02-09

3. Silicone grating fabricated using photoresist mold;Optifab 2019;2019-11-15

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