Optical beam deflection imaging of the electron beam interaction volume in semiconductors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109977
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3. Limits of different detection schemes used in the optical beam deflection method;Journal of Applied Physics;1997-08
4. Detection limits of an internal-reflection sensor for the optical beam deflection method;Applied Optics;1997-07-01
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