Inert gas jets for growth control in electron beam induced deposition
Author:
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3605588
Reference20 articles.
1. Electron-Beam-Induced Deposition of Platinum from a Liquid Precursor
2. Gas-assisted focused electron beam and ion beam processing and fabrication
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4. Electron beam stimulated chemical vapor deposition of patterned tungsten films on Si(100)
5. Electron beam-induced deposition of tungsten
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