Self-assembled monolayer as an antiadhesion layer on a nickel nanostamper in the nanoreplication process for optoelectronic applications
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2172714
Reference13 articles.
1. Temperature dependence of anti-adhesion between a stamper with sub-micron patterns and the polymer in nano-moulding processes
2. Fabrication of metallic nano-stamper and replication of nano-patterned substrate for patterned media
3. The Effect of Wettability of Nickel Mold Insert on the Surface Quality of Molded Microlenses
4. The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing
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